| Part number |
Product name |
Equipment size |
Production status |
| 0020-44453 |
BLOCKER TEOS, 300SE 300MM PRODUCER |
12" |
R&D completed - mass production |
| 0020-63185 |
BLOCKER PLATE, UNIFORM FLOW-0.2 BP STAN |
12" |
R&D completed - mass production |
| 0021-26544 |
BLOCKER TEOS HI DEP RATE 300MM PRODUCER |
12" |
R&D completed - mass production |
| 0021-46364 |
300MM BLOCKER PLATE, HPD -0.2 BP STANDO |
12" |
R&D completed - mass production |
| 0020-70842 |
BLOCKER PLATE, SIH4, BP GB, 300MM PRODUC |
12" |
R&D completed - mass production |
| 0021-47453 |
BLOCKER,SD1325 300MM, SACVD |
12" |
R&D completed - mass production |
| 0021-12790 |
BLOCKER PLATE SILANE 300MM |
12" |
R&D completed - mass production |
| 0020-48891 |
BLOCKER APF 300MM PRODUCER |
12" |
R&D completed - mass production |
| 0041-89989 |
BLOCKER PLATE, LOWER, SINGLE ZONE,PRODUCER |
12" |
R&D completed - mass production |
| 0041-94358 |
BLOCKER PLATE, UPPER, SINGLE ZONE, PRODUCER |
12" |
R&D completed - mass production |
| 0021-92064 |
BLOCKER HARP 300MM PRODUCER |
12" |
R&D completed - mass production |
| 0040-95463 |
FACEPLATE, TEOS, REMOTE CLEAN 300 MM PRODUCER |
12" |
R&D completed - mass production |
| 0041-25016 |
FACEPLATE, .70THK,NO CENTER HOLE 300MM PRODUCER SE GT |
12" |
R&D completed - mass production |
| 0021-42136 |
FACEPLATE, LOWK, XTRA ROW EXTENDING, FLOW TESTED，PRODUCER |
12" |
R&D completed - mass production |
| 0040-95475 |
FACEPLATE TEOS HIGH DEP RATE 300MM PRODUCER |
12" |
R&D completed - mass production |
| 0020-49785 |
FACEPLATE, APF 300MM PRODUCER SE |
12" |
R&D completed - mass production |
| 0020-84596 |
FACEPLATE, SILANE NIT, 300MM PRODUCER |
12" |
R&D completed - mass production |
| 0041-13896 |
FACEPLATE 26 MIL CENTERHOLERF CAP, 300MM SACVD |
12" |
R&D completed - mass production |
| 0021-03637 |
FACEPLATE SILANE PRODUCER 200MM |
8" |
R&D completed - mass production |
| 0040-87766 |
FACEPLATE 26 MIL CENTER HOLE RF CAP, 300MM SACVD |
12" |
Under development |
| 0040-84203 |
SHOWERHEAD , SPIRAL , CENTER LARGER , ALD , 300MM |
12" |
R&D completed - mass production |
| 0040-80457 |
SHOWERHEAD , SPIRAL ATO , TESTURIZED , ALD , 300MM |
12" |
R&D completed - mass production |
